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DESCRIPTION

MSP Corporation’s NanoSilica™ Size Standards are concentrated aqueous suspensions of SiO2 particles with highly uniform size distributions.
These particle size standards, currently available in nominal sizes ranging from 15 to 200 nm, are ideally suited for producing high-quality calibration standards for the next generation of wafer and photomask inspection systems.
While using MSP’s Model 2300NPT or Model 2300G3 as the particle deposition tool provides the best results, older MSP tools and those from other manufacturers’ work well with NanoSilica Size Standards.
 
Features
+ Extremely uniform size distribution
Developed using a patented SiO2 synthesis process, our NanoSilica Size Standards have size distributions narrower than commercially available PSL spheres.
+ Peak diameter measured with SI traceability
Allows yield-enhancement and metrology groups to establish traceability of their inspection and defect review methods in accordance with ISO 9000 standards and SEMI guidelines.
+ Stable when subjected to intense DUV radiation
MSP’s SiO2 particles will not degrade when exposed to DUV radiation, unlike PSL spheres, which can decrease in size.
+ Easy to use
NanoSilica particle suspensions are available in dropper-tip bottles for convenience when mixing suspensions with appropriate number concentrations for your applications.
+ High particle concentration
Some applications require high number concentrations. MSP’s particle
concentrations are one of the highest in the industry.
 
Benefits
+ Easily discern modal (peak) diameter
+ Avoid discrepancies due to differences between mean and peak diameter values
+ Prepare diluted suspensions suitable for aerosol generation devices with relatively high or low efficiencies
+ Create long-lasting calibration standards for state-of-the-art inspection tools
+ Consume less material; save money
+ Comes with a Certificate of Calibration and Traceability and a Safety Data Sheet (SDS) with handling and disposal instructions