Atomic Deposition Technology InstrumentAT-410

specification:
Product description
Integration of horizontal and vertical flow, high coating uniformity
_ small size and low cost
_ Static function to improve sample coverage
_ Touch interface and automation program
_ Real-time monitoring process
_ Built-in recipes and user-created the most widely used materials
•3 organometallic sources
•2 oxidant/reductant sources
•Built-in recipes, Al2O3, Pt,
Ru, HfO2, TiO2, ZrO2, ZnO,Al:ZnO

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DESCRIPTION

Product description
Integration of horizontal and vertical flow, high coating uniformity
_ small size and low cost
_ Static function to improve sample coverage
_ Touch interface and automation program
_ Real-time monitoring process
_ Built-in recipes and user-created the most widely used materials
•3 organometallic sources
•2 oxidant/reductant sources
•Built-in recipes, Al2O3, Pt,
Ru, HfO2, TiO2, ZrO2, ZnO,Al:ZnO