Product Information/ PRODUCTS /Four-point nanoprobes for SEM

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Four-point nanoprobes for SEM
Four-point nanoprobes for SEM
Four-point nanoprobes for SEM

Four-point nanoprobes for SEMFour-point nanoprobes

specification：
Specifications:
XY Range
Coarse positioning: ±3 mm in ±150 nm steps
Fine positioning: ≤1 μm in 10 nm* steps
Z Range
Coarse positioning: ±1.5 mm in 150 nm steps
Fine positioning: ≤1 μm in 10 nm* steps
Sample Size
10 mm × 10 mm × 1 mm
Weight
≤1000 g

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DESCRIPTION

Features:
This system is installed on an SEM platform and measures four-point electrical characteristics in sub-micron regions.
All four independent probes can be controlled in 3D.