Product Information/ PRODUCTS /
Process equipment
Atomic Deposition System Anric
Meiwafosis Pre-processing System for Point Microscope
Plasma-enhanced chemical vapor deposition system for TEOS multi-wafer processing
Inductively Coupled Plasma Etching System with Multiple Chambers
Plasma-Enhanced Chemical Vapor Deposition System (PECVD)
Plasma-Enhanced Chemical Vapor Deposition System PP1000 PECVD
Physical Vapor Deposition System PVD
Atomic Layer Deposition System FlexAL ALD
Electron Microscope High-Resolution Osmium Coating Machine
Measuring / Analyzing Instruments
OEG Optical Measurement
SURAGUS Non-Contact - Sheet Resistance and Film Thickness Measurement Instrument
SITA cleainess/ tension meter/ foam analysis
VINE Film Thickness Measurement
XPS/ESCA X-ray Photoelectron Spectroscopy/X-ray Photoelectron Spectroscopy for Chemical Analysis
Precision X-ray Cabinet Irradiator for Cells/Animals
Unisoku
IMAGE
SPM Surface Morphology Analysis
STM Surface Morphology Analysis
SEM Surface Morphology Analysis
Nano-indenter Material Stress-Strain Analysis