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NanoSilica Suspension
NanoSilica Suspension
NanoSilica Suspension
NanoSilica Suspension

NanoSilica SuspensionNanoSilica Suspension

specification：

Product Advantages:

  1. Uniform size distribution
  2. NIST traceability of size measurements
  3. Stable quality under DUV and EUV irradiation
  4. High concentration of microsphere suspension

Product Benefits:

  1. Easy detection and measurement of size peaks in particle dispensing systems, wafer surface contamination/defect inspection systems, or various analytical instruments.
  2. Avoidance of discrepancies between average size and size peaks.
  3. Suitable for aerosol generation equipment.
  4. Provides durable calibration standards for advanced inspection equipment.
  5. Cost-effective with low consumption.

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DESCRIPTION

NanoSilica™ Microsphere Standard Solution is a highly uniform SiO2 microsphere concentrate water solution manufactured by MSP Corporation. Microsphere sizes ranging from 18nm to 200nm are available, making it the most ideal and high-quality calibration standard on the market. It is suitable for the latest generation of wafer surface contamination/defect inspection systems and photomask inspection systems.

Advanced semiconductor inspection technology has progressed to below 30nm. Previously, Polystyrene latex (PSL) spherical particles were sufficient for calibration in wafer surface contamination/defect inspection systems and photomask inspection systems. However, the new generation of inspection systems requires Deep ultraviolet (DUV) or Extreme ultraviolet (EUV) to detect contamination or defects smaller than 20nm. The repeated exposure of UV light on PSL spherical particles affects their quality. Due to the stable quality of SiO2 microspheres under DUV and EUV irradiation, SiO2 microspheres are the best alternative.

NanoSilica™ Microsphere Standard Solution uses patented SiO2 synthesis technology, achieving a size distribution similar to PSL spherical particles. Currently, NanoSilica™ Microsphere Standard Solution has the most uniform size distribution among microspheres of the smallest size, making it suitable for size peak measurement.

NIST-traceable NanoSilica™ Microsphere Standard Solution is a product from MSP Corporation that is traceable to the National Institute of Standards and Technology (NIST) standard unit. It is certified with ISO 9000 and SEMI, providing a basis for yield improvement, surface inspection, and defect evaluation.

NanoSilica™ Microsphere Standard Solution is conveniently used in 15-mL droplets. Each bottle of the solution is labeled with product number, production number, microsphere size peak, size distribution full width at half maximum (FWHM), and expiration date. It also comes with NIST-traceable certification and a Material Safety Data Sheet (MSDS) for user reference.