Product Information/ PRODUCTS /Atomic Deposition Technology Instrument
Atomic Deposition Technology InstrumentAT-410
specification:
Product description
Integration of horizontal and vertical flow, high coating uniformity
_ small size and low cost
_ Static function to improve sample coverage
_ Touch interface and automation program
_ Real-time monitoring process
_ Built-in recipes and user-created the most widely used materials
•3 organometallic sources
•2 oxidant/reductant sources
•Built-in recipes, Al2O3, Pt,
Ru, HfO2, TiO2, ZrO2, ZnO,Al:ZnO
Contact window: sales@scientek-co.com
DESCRIPTION
Product descriptionIntegration of horizontal and vertical flow, high coating uniformity
_ small size and low cost
_ Static function to improve sample coverage
_ Touch interface and automation program
_ Real-time monitoring process
_ Built-in recipes and user-created the most widely used materials
•3 organometallic sources
•2 oxidant/reductant sources
•Built-in recipes, Al2O3, Pt,
Ru, HfO2, TiO2, ZrO2, ZnO,Al:ZnO